JPH0166745U - - Google Patents
Info
- Publication number
- JPH0166745U JPH0166745U JP1987162429U JP16242987U JPH0166745U JP H0166745 U JPH0166745 U JP H0166745U JP 1987162429 U JP1987162429 U JP 1987162429U JP 16242987 U JP16242987 U JP 16242987U JP H0166745 U JPH0166745 U JP H0166745U
- Authority
- JP
- Japan
- Prior art keywords
- movable aperture
- aperture device
- electron microscope
- scanning electron
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162429U JPH0166745U (en]) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162429U JPH0166745U (en]) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166745U true JPH0166745U (en]) | 1989-04-28 |
Family
ID=31446246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162429U Pending JPH0166745U (en]) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166745U (en]) |
-
1987
- 1987-10-26 JP JP1987162429U patent/JPH0166745U/ja active Pending